HR-SEM

 


The instrument used is Japanese Hitachi SU8000; it is a High Resolution Scanning Electron Microscope (HR-SEM). By using different detectors, including lower detector, upper detector and top detector, different image signals can be obtained. This equipment operates at a vacuum of 10-8 Pa, which enables you to obtain a desirable high resolution image. Combined with Bruker's Energy Dispersive Spectrometer (EDS), it can also be used for qualitative and semi-quantitative analysis of samples.
 

1.Service Provided / Equipment Applications:

(1) Secondary electron image: resolution 15kv 1.0nm & 1kv 1.4nm
(2) Back-scattered electrons image: observation of images comparison at different gray levels
(3) EDS analysis: Germany Bruker XFlash 5010 Detector Resolution:123 eV
Qualitative and semi-quantitative analysis
(4) Polymer, powder, biological, and magnetic samples are prohibited.
Samples must not be fluidic, toxic,volatile, and corrosive.
(5) Samples’ size must not exceed 8 x 8 mm; height must be less than 2 mm.
2.Standard charges:

(1) SEM and EDS: 2000 NT$/hr
(2) Gold plating: 300 NT$/once
Contact method:
Professor: Chuan-Pu Liu
Tel: (06) 2757575-62943
E-mail: cpliu@mail.ncku.edu.tw
Technician: Hui-Jung Shih
Tel: (06) 2757575-31376
E-mail: z7306007@email.ncku.edu.tw
On site:
NCKU Tzu-Chiang compus
Room 0208, Second floor,Instrument building.

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