NCKU, Core Facility Center,

X-ray Thin-Film

The Multipurpose X-ray Diffractometer is equipped with 6KW high power generator and rotating anode of copper target. With the small footprint 0.3x3 mm2 filament of X-ray source provide the high brightness for sample evaluation. Beside the high power X-ray source, the system is built with Eulerian cradle with 7 axis freedom for sample handling and samples always sit horizontally. The high energy resolution detector Lynxeye-XET supports 0D,1D and 2D mode makes the system function with no limitation for all applications for thin film samples.
Supports applications includes:
1 Gracing Incident Diffraction for phase identification.
2. Nom-Ambient Application up to 1400 degree C for powder and 1100 degree for film samples.
3. XRR for film thickness , density and roughness evaluation.
4. HRXRD for film thickness and layer composition of epitaxy structure.
5. Rocking curve for polycrystalline film quality evaluation.
6. Stress measurement for bulk and thin film samples.
7. Texture measurement and evaluation.

 

Application form

Tel:(06)2757575 ext. 61362

E-mail:jmchen@mail.ncku.edu.tw

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