Ultra-high resolution field-emission Scanning Electron Microscope with EDS and EBSD
This instrument combines with HITACHI SU-5000 Thermal Field Efficient High Resolution Field Emission Scanning Electron Microscope(HR-SEM), EDAX Energy Dispersive Spectroscopy (EDS) and Electron backscatter diffraction (EBSD). It can be used as a surface image of Morphology observation, semi-quantitative analysis, elemental distribution analysis, etc.,(Since 2016 Dec.)